 |
| |||
| radio-frequency plasma; radio-frequency-generated plasma; RF-discharge plasma; RF-produced plasma; high-frequency plasma | |||
|
плазма ВЧ-разряда : 4 短语, 2 学科 |
| 微电子学 | 1 |
| 电子产品 | 3 |
|
| |||
| radio-frequency plasma; radio-frequency-generated plasma; RF-discharge plasma; RF-produced plasma; high-frequency plasma | |||
|
плазма ВЧ-разряда : 4 短语, 2 学科 |
| 微电子学 | 1 |
| 电子产品 | 3 |