| |||
plasma-enhanced CVD | |||
plasma chemical vapor deposition | |||
plasma-assisted activated CVD (CVD — chemiclal vapor deposition); plasma-CVD (CVD — chemiclal vapor deposition) | |||
plasma enhanced chemical vapor deposition | |||
| |||
plasma enhanced chemical vapour deposition (Belllka) |
плазмохимическое осаждение из паровой фазы: 1 do fraz, 1 tematyki |
Mikroelektronika | 1 |