 |
| |||
| run-out; runout; runout error (durch Lageverzerrung) | |||
| planimetric error; position error | |||
| positioning error; error of position; plane error; stepping error (mask production) | |||
| positional error | |||
|
Lagefehler : 5 do fraz, 3 tematyki |
| Elektronika | 1 |
| Mikroelektronika | 3 |
| Optyka | 1 |