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scattering with angular limitation projection electron-beam lithography | technique
 technique
gen. техническое оснащение или оборудование; способ выполнения; техническое оснащение; владение специальными приёмами
law приём
med. оборудование; аппаратура; процедура
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SCattering with Angular Limitation Projection Electron beam Lithography

stresses
abbr., astronaut., mil. SCALPEL
scattering with angular limitation projection electron-beam lithography
: 1 phrase in 1 subject
Integrated circuits1

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