| |||
| positional error | |||
| planimetric error; position error | |||
| run-out; runout; runout error (durch Lageverzerrung) | |||
| positioning error; error of position; plane error; stepping error (mask production) | |||
|
Lagefehler : 5 phrases in 3 subjects |
| Electronics | 1 |
| Microelectronics | 3 |
| Optics branch of physics | 1 |