variable shaped beam
| system
| variable shaped beam abbr. | |
| microel. | variabler Formstrahl; variabler Flächenstrahl |
| system abbr. | |
| gen. | Methode; System; Anlage |
| refrig. | System |
| tech. | Anlage; Anordnung; Bauart; Netz; Netzverbund; Bezugssystem datum |
| |||
| variabler Formstrahl; variabler Flächenstrahl | |||
|
variable shaped beam : 9 phrases in 1 subject |
| Microelectronics | 9 |