variable shaped beam
| concept
| variable shaped beam | |
| microel. | variabler Formstrahl; variabler Flächenstrahl |
| concept | |
| gen. | Auffassung; Begriff; Entwurf; Konzept; Konzeption; Plan |
| tech. | Gedanke; Leitbild |
| |||
| variabler Formstrahl; variabler Flächenstrahl | |||
|
variable shaped beam : 9 phrases in 1 subject |
| Microelectronics | 9 |