mask feature
| placement error
| mask feature abbr. | |
| microel. | Strukturelement der Maske |
| placement error abbr. | |
| microel. | Plazierungsfehler |
| |||
| Strukturelement der Maske | |||
|
mask feature : 5 phrases in 1 subject |
| Microelectronics | 5 |