electron lithography
| system
| electron lithography | |
| gen. | Elektronenlithographie |
| system | |
| gen. | Methode; System; Anlage |
| refrig. | System |
| tech. | Anlage; Anordnung; Bauart; Netz; Netzverbund; Bezugssystem datum |
| |||
| Elektronenlithographie f | |||
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electron lithography : 15 phrases in 4 subjects |
| Computers | 1 |
| General | 3 |
| Microelectronics | 10 |
| Physics | 1 |