electron beam patterning
| at
| final size
| electron-beam patterning | |
| microel. | Elektronenstrahlstrukturierung |
| at | |
| gen. | an; auf; beim; im; über; zu |
| final size | |
| pack. | Endformat |
| |||
| Elektronenstrahlstrukturierung f | |||
|
electron beam patterning : 4 phrases in 1 subject |
| Microelectronics | 4 |