beam positioning
| system
| beam positioning | |
| tech. | Punktlageregelung |
| system | |
| gen. | Methode; System; Anlage |
| refrig. | System |
| tech. | Anlage; Anordnung; Bauart; Netz; Netzverbund; Bezugssystem datum |
| |||
| Punktlageregelung f | |||
|
beam positioning : 6 phrases in 3 subjects |
| Automated equipment | 1 |
| Microelectronics | 2 |
| Technology | 3 |