| Subject | English | German |
| microel. | failures screened per test step | je Prüfposition selektierte Fehler |
| tech. | test step | Testschritt |
| comp., MS | test step | Testschritt (An action to be taken when the test is run, and possibly the expected result from that action) |
| tech. | test step | Prüfschritt |
| microel. | test step | Prüfposition |