| Subject | English | German |
| tech. | accuracy of flatness | Plangenauigkeit (Andrey Truhachev) |
| opt. | check for flatness and parallelism | auf Ebenheit und Parallelität prüfen |
| construct. | degree of flatness | Ebenheitsgrad |
| opt. | departure from flatness at selected points | Unebenheit in bestimmten Punkten |
| opt. | departure of flatness | Unebenheit |
| opt. | departure of flatness | Abweichung von der Ebenheit |
| opt. | determination of flatness | Ebenheitsprüfung |
| opt. | deviation from flatness | Unebenheit (straightness) |
| opt. | deviation from flatness | Abweichung von der Ebenheit |
| tech. | deviation from pulse flatness | Dachschraege (von Impulsen) |
| tech. | distortion due to lack of flatness | Feldkruemmungsverzerrung |
| opt. | field flatness | Bildfeldebnung |
| opt. | film flatness | Filmplanlage |
| microel. | flatness checker | Ebenheitsprüfgerät |
| opt. | flatness checking | Prüfung der Planheit |
| tech., met. | flatness defect for the sides of a sheet, camber defect of a sheet | Abweichung von der Seitengeradheit der Tafel |
| construct. | flatness deviation | Ebenheitsabweichung |
| microel. | flatness error | Ebenheitsfehler |
| phys. | flatness factor | Völligkeitsgrad |
| phys. | flatness factor | Steilheit |
| tech. | flatness gauge | Planheitsmeßgerät |
| gen. | flatness imperfection | Unebenheit |
| microel. | flatness measurement technique | Ebenheitsmeßverfahren |
| tech., mater.sc. | flatness measuring | Planheitsmessung |
| opt. | flatness of a surface | Planheit einer Fläche |
| opt. | flatness of a surface | Ebenheit einer Fläche |
| med. | flatness of emotional response | Gefühlsverarmung |
| opt. | flatness of field | Bildfeldebnung |
| tech. | flatness of field | Bildfeldebnung (Optik) |
| opt. | flatness of film | Planlage des Films |
| weap. | flatness of trajectory | Rasanz der Flugbahn |
| IT, dat.proc. | flatness parameter | Flachheitsparameter |
| microel. | flatness requirement | Anforderung an die Ebenheit |
| microel. | flatness tester | Ebenheitsprüfgerät |
| opt. | flatness testing | Planheitsprüfung |
| opt. | flatness testing | Prüfung auf Planheit (checking) |
| microel. | flatness testing | Ebenheitsprüfung (von Wafern) |
| opt. | flatness testing interferometer | Interferometer für Planheitsprüfung |
| tech. | flatness tolerance | zulässige Unebenheit |
| tech., law | flatness tolerance | zulaessige Abweichung von der Ebenheit |
| el. | gain flatness | Verstärkungsverlauf |
| met. | hot strip flatness | Planheit von Warmband |
| opt. | interferometer for flatness testing | Interferometer für Planheitsprüfung |
| microel. | lack of flatness | Unebenheit |
| mater.sc., mech.eng. | lack of flatness | Planheitsfehler |
| fin. | market flatness | flaute stagnation |
| opt. | microscopic deviation from flatness | kleinste Unebenheit |
| gen. | non-flatness | Unebenheit |
| industr., construct., met. | out of flatness | unrund |
| industr., construct., met. | out of flatness | verformt |
| industr., construct., met. | out of flatness | uneben |
| industr., construct., met. | out of flatness | oval |
| tech. | out-of-flatness | Unebenheit |
| microel. | out-of-flatness of the mask and wafer | Unebenheit der Maske und des Wafers |
| gen. | out-of-flatness zone | Unebenheitszone |
| microel. | photomask flatness tester | Ebenheitsprüfgerät für Fotomasken |
| microel. | place tight requirements on the flatness of the wafer surface | strenge Anforderungen an die Ebenheit der Waferoberfläche stellen |
| microel. | resist coating non-flatness | Resistschichtunebenheit |
| el. | small signal gain flatness | Welligkeit der Kleinsignalverstärkung |
| microel. | substrate flatness error | Substratebenheitsfehler |
| tech., law | tolerance on flatness | zulaessige Abweichung von der Ebenheit |
| microel. | variation in wafer flatness | Unebenheit des Wafers |
| microel. | wafer flatness | Waferebenheit |
| microel. | wafer flatness tester | Waferebenheitsprüfgerät |
| microel. | wafer non-flatness | Unebenheit des Wafers |