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alignment error
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Subject
English
German
microel.
alignment error
from layer to layer
Justierfehler von Schicht zu Schicht
microel.
overall
alignment error
from layer to layer
Gesamtjustierfehler von Schicht zu Schicht
opt.
shaft
alignment error
in plane of axis
Achsneigungsfehler
opt.
shaft
alignment error
perpendicular to plane of axis
Achsschränkungsfehler
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