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Micro System
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Subject
English
German
phys.
micro system
technology
Mikrosystemtechnik
IT, nat.sc.
micro systems
technology
Mikrosystemtechnik
gen.
micro-electromechanical systems
mikro-elektromechanische Systeme
MEMS
IT
micro-system
Mikrosystem
tech.
X-ray, micro-analysis system
Röntgenmikroanalyseanlage
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