Terms containing reactive ion etch

Subject	English	Chinese
el.	magnetically enhanced reactive ion etch process	磁增强反应离子蚀刻工艺
el.	post-reactive ion etch linewidth	反应离子蚀刻后线宽
el.	post-reactive ion etch across-chip linewidth variation	反应离子蚀刻后通片线宽变差
space	reactive ion etch process	反应离子蚀刻工艺