Terms containing reactive ion beam etching

Subject	English	Chinese
el.	chemically assisted reactive ion beam etching	化学辅助反应离子束蚀刻
el.	electron cyclotron resonance reactive ion beam etching	电子回旋共振反应离子束蚀刻
el.	reactive beam ion beam etching	反应束离子束蚀刻
space	reactive ion beam etching	反应离子束蚀刻
avia.	reactive ion beam etching	反应离子束刻蚀
el.	ultrahigh vacuum reactive ion beam etching	超高真空反应离子束蚀刻