Terms containing proximity effect correction

Subject	English	Chinese
el.	preprocessor for proximity effect correction	邻近效应校正预处理程序
el.	proximity effect correction	邻近效应校正
el.	self-consistent proximity effect correction technique for resist exposure	抗蚀剂曝光邻近效应自洽校正技术
el.	system for proximity effect correction for advanced lithography and reticle	先进光刻及中间掩模邻近效应校正系统软件