Terms containing post-reactive ion etching

Subject	English	Chinese
el.	post-reactive ion etch linewidth	反应离子蚀刻后线宽
el.	post-reactive ion etch across-chip linewidth variation	反应离子蚀刻后通片线宽变差
el.	post-reactive ion etching annealing	反应离子蚀刻后退火