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ion- etching
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el.
Ar ion beam etching
氩离子束蚀刻
phys.
argon
ion etching
氩离子刻蚀
el.
chemically assisted ion beam etching
化学辅助离子束蚀刻
el.
chemically assisted reactive ion beam etching
化学辅助反应离子束蚀刻
el.
deep reactive
ion etching
深反应离子蚀刻
chem.
deep reactive
ion etching
深度反应离子刻蚀
auto.
deep reactive
ion etching
离子深电抗性蚀刻
chem.
deep reactive
ion etching
深度反应离子腐蚀
el.
double-source excited reactive
ion etching
双源激发反应离子蚀刻
el.
electron cyclotron resonance reactive ion beam etching
电子回旋共振反应离子束蚀刻
el.
electron cyclotron resonance reactive
ion etching
电子回旋共振反应离子蚀刻
el.
flap shield confined plasma reactive
ion etching
隔板约束等离子体反应离子蚀刻
el.
focused ion beam etching
聚焦离子束蚀刻
el.
focused ion beam gas-assisted etching
聚焦离子束气体辅助蚀刻
el.
focused ion beam induced etching
聚焦离子束诱生蚀刻
el.
gas-assisted focused ion beam etching
气体辅助聚焦离子束蚀刻
el.
high pressure reactive
ion etching
高压反应离子蚀刻
el.
ion beam assisted etching
离子束辅助蚀刻
el.
ion beam enhanced etching
离子束增强蚀刻
chem.
ion beam etching
离子束刻蚀
space
ion beam etching
离子束蚀刻
avia.
ion beam etching
离子束腐蚀
el.
ion beam inhibited etching
离子束阻蚀
el.
ion beam inhibited etching
离子束抑制蚀刻
el.
ion bombardment enhanced etching
离子轰击增强蚀刻
el.
ion bombardment enhanced selective etching
离子轰击增强选择性蚀刻
met.
ion bombardment etching
离子轰击浸蚀
repr.biol.
ion etching
离子蚀刻法
space
ion etching
离子刻蚀
oil
ion etching
离子蚀刻
space
ion etching
equipment
离子刻蚀设备
mater.sc.
ion milling etching
离子铳削刻蚀
el.
ion-assisted etching
离子辅助蚀刻
el.
ion-assisted gas etching
离子辅助气体蚀刻
plast.
ion-beam etching
离子束蚀刻
chem.
ion-etching
离子浸蚀
法
chem.
ion-etching
离子蚀刻
法
el.
large area source supported
ion etching
大面积离子源离子蚀剂
el.
magnetically confined plasma reactive
ion etching
磁约束等离子体反应离子蚀刻
chem.
magnetically controlled reactive
ion etching
磁控反应离子腐蚀
el.
magnetically enhanced reactive
ion etch
process
磁增强反应离子蚀刻
工艺
el.
magnetically enhanced reactive
ion etching
磁增强反应离子蚀刻
el.
magnetically-enhanced
ion etching
磁增强离子蚀刻
el.
magnetron enhanced reactive
ion etching
磁控增强反应离子蚀刻
el.
magnetron
ion etching
磁控离子蚀刻
el.
magnetron reactive
ion etching
磁控反应离子蚀刻
el.
magnetron-plasma ion beam etching
磁控等离子体离子束蚀刻
el.
metal-organic reactive
ion etching
金属有机物反应离子蚀刻
el.
methane/hydrogen/argon reactive
ion etching
甲烷/氢/氩反应离子蚀刻
el.
oxygen reactive
ion etching
氧反应离子蚀刻
el.
plasma-enhanced reactive
ion etching
等离子体增强反应离子蚀刻
el.
post-reactive
ion etch
linewidth
反应离子蚀刻后
线宽
el.
post-reactive
ion etch
across-chip linewidth variation
反应离子蚀刻后通片线宽变差
el.
post-reactive
ion etching
annealing
反应离子蚀刻后退火
el.
propagation
ion etch
传播离子蚀刻
el.
radical beam and ion beam etching
离子团束与离子束复合蚀刻
el.
rapid
ion etch
快速离子蚀刻
el.
reactive beam ion beam etching
反应束离子束蚀刻
space
reactive ion beam etching
反应离子束蚀刻
avia.
reactive ion beam etching
反应离子束刻蚀
chem.
reactive ion enhanced etching
反应离子增强腐蚀
space
reactive
ion etch
process
反应离子蚀刻工艺
mater.sc.
reactive-
ion etching
反应离子刻蚀
space
reactive
ion etching
反应离子蚀刻
avia.
reactive
ion etching
反应离子刻蚀
space
reactive
ion etching
process
反应离子蚀刻工艺
el.
reactive
ion etching
resistance
抗反应离子蚀刻性
el.
reactive magnetron
ion etching
磁控反应离子蚀刻
el.
selective niobium
ion etching
process
选择性铌离子蚀刻工艺
el.
selective reactive
ion etching
选择性反应离子蚀刻
el.
ultrahigh vacuum reactive ion beam etching
超高真空反应离子束蚀刻
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