Terms containing feature size

Subject	English	Chinese
el.	feature size	特征尺寸
wind.	feature size	形体尺寸
el.	feature size depending dose	特征尺寸依存剂量
el.	feature size depending dose	特征尺寸-曝光剂量依从关系
el.	minimum feature size	最小特征尺寸
el.	normalized feature size	归一化特征尺寸
el.	normalized minimum feature size	归一化最小特征尺寸
mech.	regardless of feature size	不考虑零件尺寸
auto.	regardless of feature size	不顾零件尺寸大小
tech.	size of interpretation feature	解译特征大小