| Subject | English | Chinese |
| el. | advanced simulation of dry-etching process technology | 先进干法蚀刻工艺模拟技术一种三维离子增强干法蚀刻工艺模拟程序 |
| el. | automated encyclopedia of dry etch process technology | 自动化干法蚀刻工艺技术大全百科全书一种计算机辅助文献检索系统 |
| mater.sc. | etching technology | 蚀刻工艺 |
| el. | metal etching technology | 金属蚀刻技术 |