| Siliziumprogrammierelement | Nominativ, Singular | nominative case, singular | |
| Siliziumprogrammierelements | Genitiv, Singular | genitive case, singular | |
| Siliziumprogrammierelement | Dativ, Singular | dative case, singular | |
| Siliziumprogrammierelement | Akkusativ, Singular | accusative case, singular | |
| - | Nominativ, Plural | ||
| - | Genitiv, Plural | ||
| - | Dativ, Plural | ||
| - | Akkusativ, Plural |