| Diffusionsvorgang | Nominativ, Singular | nominative case, singular | |
| Diffusionsvorgang(e)s | Genitiv, Singular | genitive case, singular | |
| Diffusionsvorgänge | Dativ, Singular | dative case, singular | |
| Diffusionsvorgängen | Akkusativ, Singular | accusative case, singular |