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ion-assisted plasma etching | |||
reactive ion etching; reactive-ion etching; RIE (Reactive Ion Etch/Etching pansypras) | |||
reactive ion milling |
реактивное ионное травление: 18 phrases in 6 subjects |
Electronics | 2 |
General | 1 |
Mass media | 1 |
Microelectronics | 4 |
Nanotechnology | 7 |
Technology | 3 |