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to phrases
local oxidation of silicon
comp.
LOCOS
f
;
lokale Siliziumoxydation
(Bipolar-Planar-Technologie)
microel.
Lokaloxydation von Silizium
(zur Isolation aktiver Bauelemente von hochintegrierten Si-Schaltkreisen)
local oxidation of silicon:
3 phrases
in 1 subject
Microelectronics
3
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