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等离子体增强金属有机物化学汽相淀积
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电子回旋共振
等离子体增强金属有机物化学汽相淀积
electron cyclotron resonance plasma-enhanced metalorganic chemical vapor deposition
等离子体增强金属有机物化学汽相淀积
. plasma-enhanced metal-organic chemical vapor deposition
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