Terms for subject Microelectronics containing X-ray machine

English	German
step-and-repeat X-ray machine	Röntgenrepeateranlage
X-ray exposure machine	Röntgenbelichtungsanlage
X-ray lithography exposure machine system	röntgenlithografische Belichtungsanlage
X-ray lithography machine	röntgenlithografisches Gerät
X-ray step-and-repeat machine	Röntgenrepeateranlage
X-ray wafer exposure machine	Röntgenwaferbelichtungsanlage