Terms for subject Electronics containing lithography simulation

English	Chinese
lithography simulation	光刻模拟
simulation and modeling of profiles for lithography and etching	光刻及蚀刻剖面的模拟与模型设计程序
simulation of optical lithography in three dimensions	三维光学光刻模拟
X-ray lithography modeling and simulation	X 射线光刻模型设计与模拟一种三维X射线光刻模拟程序