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simulation of optical lithography in | three
 three
gen. tri
| dimensions
 dimension
micr. dimensiwn
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simulation

['sɪmju'leɪʃ(ə)n] s
mil., abrev. sml
mil., logíst. Element of deception active measures aimed at deceiving the enemy regarding friendly intentions and аддгеззіопаїа, by making him collect false information. (FRA)